Abstract

Coatings that consisted of the high-entropy AlTiCrVNbMo alloy were obtained by ion sputtering in plasma of compressed vacuum-arc discharge. The hardness of this metal coating is at the level of 18 GPa due to the presence of nanostructures along with cluster structures. Coatings made of this alloy in a nitrogen atmosphere are solid solutions based on an FCC lattice; the hardness of these coatings is in the range of 28–44 GPa and the combined elastic modulus is in the range of 255–340 GPa for coatings obtained in different technological modes. The hardness values of the oxide coatings are in the range of 33–35 GPa and the values of the combined elastic modulus are in the range of 280–290 GPa. The friction coefficient of this alloy depends on alloy hardness and ranges from 0.24 to 0.061.

中文翻译：

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基于AlTiCrVNbMo合金的高熵超硬涂层

摘要

在压缩真空电弧放电的等离子体中，通过离子溅射获得了由高熵AlTiCrVNbMo合金组成的涂层。由于存在纳米结构和簇结构，该金属涂层的硬度为18 GPa。在氮气氛下，这种合金制成的涂层是基于FCC晶格的固溶体。对于以不同技术模式获得的涂层，这些涂层的硬度在28–44 GPa的范围内，组合弹性模量在255–340 GPa的范围内。氧化物涂层的硬度值在33–35 GPa的范围内，组合弹性模量的值在280–290 GPa的范围内。该合金的摩擦系数取决于合金硬度，范围为0.24至0.061。