Analysis of surface structures formed due to femtosecond laser surface ablation is usually done through subjective assessment of the surface images. Here, we analyze the evolution of femtosecond laser-induced surface structures using multifractal analysis. We computed the singularity spectrum to characterize the behavior of laser-induced herringbone patterns. The surface morphology of the ablated surface shows a polarization dependent multifractal nature. The singularity spectrum depicts three distinct morphological phases that sequentially form as a function of the laser pulse number. We objectively characterize the laser-dependent morphological properties of herringbone structures. Multifractal analysis was able to reflect the hierarchy, uniformity, and roughness of the formed structures and their dependence on the pulse number and polarization.

由于飞秒激光表面烧蚀而形成的表面结构的分析通常是通过主观评估表面图像来完成的。在这里，我们使用多重分形分析来分析飞秒激光诱导的表面结构的演变。我们计算了奇异光谱以表征激光诱导的人字形图案的行为。烧蚀表面的表面形态显示出偏振相关的多重分形性质。奇异光谱描绘了三个不同的形态相，它们随激光脉冲数的变化依次形成。我们客观地描述了人字形结构的激光依赖性形态学特性。多重分形分析能够反映所形成结构的层次，均匀性和粗糙度及其对脉冲数和极化的依赖性。