Abstract

We present the results of experimental studies of the modification of the surface layer of grade 316L steel by duplex treatment, including ion-plasma treatment under nitrogen followed by plasma activated chemical vapor deposition of hydrocarbon films doped with silicon and oxygen (a-C:H:SiO_x). The mechanical properties of the steel surface (hardness, modulus of elasticity, plasticity index, resistance to plastic deformation) were determined by the nanoindentation method, and the adhesion of the films was evaluated by the scratch test method. The greatest improvement in the mechanical properties of the film–substrate system was observed after the deposition of an a-C:H:SiO_x film on a surface preliminarily hardened by ion-plasma treatment in a nitrogen plasma.

中文翻译：

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双相工艺对316L不锈钢力学性能的影响

摘要

我们提出通过双工治疗，包括在氮气下离子等离子体处理级316L钢的表面层的改性的实验研究的结果，接着等离子体活化掺杂有硅和氧（烃膜的化学气相沉积一个-C：H ：SiO _x）。通过纳米压痕法测定钢表面的机械性能（硬度，弹性模量，塑性指数，抗塑性变形性），并通过划痕试验法评价膜的密合性。沉积a -C：H：SiO _x之后，观察到膜-基底系统机械性能的最大改善 在氮等离子体中通过离子等离子处理预先硬化的表面上的碳膜。