This paper presents a bio-inspired cantilever-type SAW pressure sensor based on Scandium-doped AlN (ScAlN)/3CSiC/Si layer structure. The proposed biomimetic microcantilever is configured with stress concentration region (SCR) comprising of a series of narrow slits. For a given depth, by properly setting the number and the width of those slits for a given depth, homogeneous stress/strain distribution in vicinity of SCR are achieved. Furthermore, multi-physics finite element modeling for evaluating the pressure coefficient of frequency (PCF) of a one-port SAW resonant sensor is performed and validated. Then the PCF for the proposed SAW pressure sensor with the optimized biomimetic microcantilever is analyzed. The dependence of ScAlN thin film thickness h _ScAlN and scandium-doped concentration r of Sc _r Al_1-r N thin film on PCF for different SAW modes including Rayleigh mode and Sezawa mode are calculated. The investigation results show that the maximum PCF of −111 ppm bar⁻¹ can be achieved for Rayleigh mode, which is 2.4 times larger than that of the previously reported ZnO/Si structure. In addition, its PCF has weak dependence on h _ScAlN, which are quite favorable for manufacturing pressure sensors with good reproducibility. The conceived bio-inspired cantilever-type SAW devices based on ScAlN/3 CSiC/Si structure will open the door to develop pressure sensors with a stable and reliable performance and enhanced sensitivity.

本文提出了一种基于Scan掺杂的AlN（ScAlN）/ 3CSiC / Si层结构的生物启发式悬臂式声表面波压力传感器。拟议的仿生微悬臂梁配置有应力集中区域（SCR），该区域包括一系列窄缝。对于给定的深度，通过适当设置给定深度的狭缝的数量和宽度，可以在SCR附近获得均匀的应力/应变分布。此外，执行并验证了用于评估单端口SAW谐振传感器的频率压力系数（PCF）的多物理场有限元建模。然后，对拟议的具有最佳仿生微悬臂梁的声表面波压力传感器的PCF进行分析。ScAlN薄膜厚度h _ScAlN与concentration掺杂浓度的关系ř钪_{- [R}的Al _{1 -r}上PCF N薄膜为不同的SAW模式，包括瑞利模式和Sezawa模式进行计算。研究结果表明，对于瑞利模式，可实现-111 ppm bar ^-1的最大PCF ，这是先前报道的ZnO / Si结构的2.4倍。此外，其PCF对h _ScAlN的依赖性_较弱，这对于制造具有良好可重复性的压力传感器非常有利。基于ScAlN / 3 CSiC / Si结构的，受生物启发的悬臂式SAW器件将为开发具有稳定可靠性能和增强灵敏度的压力传感器打开大门。