In this study, suspended micro‐heater using TiN for decreasing power dissipation was fabricated and evaluated. The self‐supporting film of the suspended filament was developed by the low compressive stress SiO₂ film deposited by the dc reactive sputtering method with rf substrate bias and the post annealing at 900°C. In the suspended structure process, single photolithography process and two wet etching process of HF and KOH solution were used. The power dissipation of the suspended heaters was obtained about 70 mW and it is indicated that the power dissipation is able to reduce than the other structure in previous research. Then, it is expected that the TiN micro‐heater using suspended structure is applicable to several MEMS sensors.

中文翻译：

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使用TiN制备和评估悬挂式微型加热器

在本研究中，制造并评估了使用TiN降低功耗的悬挂式微型加热器。悬浮长丝的自支撑膜是通过使用直流反应溅射法，射频衬底偏压和在900°C下进行后退火而沉积的低压应力SiO ₂膜制成的。在悬浮结构工艺中，使用了单光刻工艺和HF和KOH溶液的两次湿法刻蚀工艺。悬挂式加热器的功耗约为70 mW，这表明该功耗比先前研究中的其他结构能够降低。然后，预期采用悬挂结构的TiN微型加热器可适用于多个MEMS传感器。