ABSTRACT

Polydimethylsiloxane (PDMS) has been used extensively for microfluidic devices due to its chemical properties allowing for rapid molding and versatile biological application. Soft lithography-based PDMS fabrication primarily comprises casting from patterned photoresist on a silicon wafer. The patterned photoresist is often replaced with the cast PDMS as a more durable template mold for final PDMS fabrication that is less fragile and expensive. PDMS-PDMS double-casting prolongs the longevity of soft lithography molds and reduces overall costs to microfluidic applications. A common end to the lifetime of PDMS negative masters is the risk of bonding between the replicate and mold and distorted topographical features. This review examines common chemical and physical debonding approaches between PDMS-PDMS castings to extend the lifetime of PDMS masters.

摘要

聚二甲基硅氧烷（PDMS）的化学性质使其可以快速成型并具有广泛的生物学应用，因此已广泛用于微流体装置。基于软光刻的PDMS制造主​​要包括在硅晶片上从图案化的光刻胶进行浇铸。图案化的光致抗蚀剂通常用铸造的PDMS代替，作为用于最终PDMS制造的更耐用的模板模具，这种模具不那么脆弱且昂贵。PDMS-PDMS双重浇铸可延长软光刻模具的使用寿命，并降低微流体应用的总体成本。PDMS底版母版使用寿命的一个共同终点是复制品和模具之间粘合的风险以及变形的形貌特征。