Abstract Refractory transition-metal (TM) diborides have high melting points, excellent hardness, and good chemical stability. However, these properties are not sufficient for applications involving extreme environments that require high mechanical strength as well as oxidation and corrosion resistance. Here, we study the effect of Cr addition on the properties of ZrB2-rich Zr1-xCrxBy thin films grown by hybrid high-power impulse and dc magnetron co-sputtering (Cr-HiPIMS/ZrB2-DCMS) with a 100-V Cr-metal-ion synchronized potential. Cr metal fraction, x = Cr/(Zr + Cr), is increased from 0.23 to 0.44 by decreasing the power P ZrB 2 applied to the DCMS ZrB2 target from 4000 to 2000 W, while the average power, pulse width, and frequency applied to the HiPIMS Cr target are maintained constant. In addition, y decreases from 2.18 to 1.11 as a function of P ZrB 2 , as a result of supplying Cr to the growing film and preferential B resputtering caused by the pulsed Cr-ion flux. ZrB2.18, Zr0·77Cr0·23B1.52, Zr0·71Cr0·29B1.42, and Zr0·68Cr0·32B1.38 films have hexagonal AlB2 crystal structure with a columnar nanostructure, while Zr0·64Cr0·36B1.30 and Zr0·56Cr0·44B1.11 are amorphous. All films show hardness above 30 GPa Zr0.56Cr0.44B1.11 alloys exhibit much better toughness, wear, oxidation, and corrosion resistance than ZrB2.18. This combination of properties makes Zr0·56Cr0·44B1.11 ideal candidates for numerous strategic applications.

中文翻译：

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多功能富含 ZrB2 的 Zr1-xCrxBy 薄膜，具有增强的机械、氧化和腐蚀特性

摘要 难熔过渡金属（TM）二硼化物熔点高、硬度高、化学稳定性好。然而，这些特性对于涉及需要高机械强度以及抗氧化和抗腐蚀性能的极端环境的应用来说是不够的。在这里，我们研究了 Cr 添加对通过混合高功率脉冲和直流磁控共溅射 (Cr-HiPIMS/ZrB2-DCMS) 与 100-V Cr- 生长的富含 ZrB2 的 Zr1-xCrxBy 薄膜性能的影响金属离子同步电位。通过将施加到 DCMS ZrB2 靶的功率 P ZrB 2 从 4000 降低到 2000 W，而将施加的平均功率、脉冲宽度和频率从 0.23 增加到 0.44，Cr 金属分数HiPIMS Cr 目标保持恒定。此外，y 从 2.18 减少到 1。图11作为P ZrB 2 的函数，作为向生长膜提供Cr和由脉冲Cr离子通量引起的优先B再溅射的结果。ZrB2.18、Zr0·77Cr0·23B1.52、Zr0·71Cr0·29B1.42和Zr0·68Cr0·32B1.38薄膜具有柱状纳米结构的六方AlB2晶体结构，而Zr0·64Cr0·36B1.30和Zr0 56Cr0·44B1.11为非晶态。所有薄膜都显示出高于 30 GPa 的硬度 Zr0.56Cr0.44B1.11 合金比 ZrB2.18 具有更好的韧性、耐磨性、抗氧化性和耐腐蚀性。这种特性组合使 Zr0·56Cr0·44B1.11 成为众多战略应用的理想选择。38薄膜具有六方柱状AlB2晶体结构，而Zr0·64Cr0·36B1.30和Zr0·56Cr0·44B1.11为非晶态。所有薄膜都显示出高于 30 GPa 的硬度 Zr0.56Cr0.44B1.11 合金比 ZrB2.18 具有更好的韧性、耐磨性、抗氧化性和耐腐蚀性。这种特性组合使 Zr0·56Cr0·44B1.11 成为众多战略应用的理想选择。38薄膜具有六方柱状AlB2晶体结构，而Zr0·64Cr0·36B1.30和Zr0·56Cr0·44B1.11为非晶态。所有薄膜都显示出高于 30 GPa 的硬度 Zr0.56Cr0.44B1.11 合金比 ZrB2.18 具有更好的韧性、耐磨性、抗氧化性和耐腐蚀性。这种特性组合使 Zr0·56Cr0·44B1.11 成为众多战略应用的理想选择。