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Image sensor for spectral-domain optical coherence tomography on a chip
Electronics Letters ( IF 1.1 ) Pub Date : 2020-12-01 , DOI: 10.1049/el.2020.1898
M. Vlaskovic 1 , H. Zimmermann 2 , G. Meinhardt 1 , J. Kraft 1
Affiliation  

This Letter presents a global shutter image sensor based on PIN photodiodes intended to be used for optical coherence tomography (OCT) in the spectral domain, where the light is brought to the photodiodes via optical waveguides monolithically integrated on top of electronics in a photonic layer. Photodiodes are optimised to have the peak responsivity in the wavelength range between 800 and 900 nm, while the main features of electronics are high signal-to-noise ratio, high frame rate, low-power consumption and low noise. The sensor is designed using 0.35 µm high voltage CMOS and employing low doped epitaxial starting material in order to improve the detector efficiency by enabling fully depleted photodiodes and lowering the crosstalk. Image sensor parameters are obtained using the photon-transfer curve method and compared with commercial cameras for OCT.

中文翻译:

用于芯片上光谱域光学相干断层扫描的图像传感器

这封信提出了一种基于PIN光电二极管的全局快门图像传感器,该传感器打算用于光谱域中的光学相干断层扫描(OCT),其中光通过单片集成在光子层电子器件顶部的光波导被带到光电二极管。光电二极管经过优化,可在800至900 nm的波长范围内具有峰值响应度,而电子产品的主要功能是高信噪比,高帧频,低功耗和低噪声。该传感器采用0.35 µm高压CMOS设计,并采用低掺杂的外延起始材料,以通过实现完全耗尽的光电二极管并降低串扰来提高检测器效率。
更新日期:2020-12-04
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