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Evidence of hydrogen termination at grain boundaries in ultrananocrystalline diamond/hydrogenated amorphous carbon composite thin films synthesized via coaxial arc plasma
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-11-01 , DOI: 10.1116/6.0000545
Naofumi Nishikawa 1, 2
Affiliation  

Ultranonocrystalline diamond/hydrogenated amorphous carbon composite thin films consist of three different components; ultrananocrystalline diamond crystallites, hydrogenated amorphous carbon, and grain boundaries between them. Since grain boundaries contain a lot of dangling bonds and unsaturated bonds, they would be a cause of carrier trap center degrading device performance in possible applications such as UV photo-detectors. We experimentally demonstrate hydrogen atoms preferentially incorporate at grain boundaries and terminate dangling bonds by means of several spectroscopic techniques. XPS measurements cannot detect quantitative transitions of sp^2- and sp^3-hybridized carbons in the films, resulting in 55-59 % of sp^3 contents. On the other hand, FT-IR and NEXAFS exhibit some variations of the amounts of certain carbon hybridization for sure. The former confirms the transformation from sp^2 to sp^3 hydrocarbons by ~10 % by additional hydrogenation, and the latter represents chemical configuration changes from {\pi}* C{\equiv}C and {\pi}* C=C to {\sigma}* C-H. These results can be an evidence of localized hydrogen at grain boundaries, which plays a part in terminating dangling bonds and unsaturated bonds, and they are correlated with the optical and electrical properties of the films investigated in some previous research. Our spectroscopic studies on the hydrogenation effects combined with the discussion on the optical and electrical characteristics confirm that the hydrogenation can be an effective tool of an enhancement of photovoltaic performance in the above sensing applications.

中文翻译:

同轴电弧等离子体合成的超纳米晶金刚石/氢化非晶碳复合薄膜晶界处氢终止的证据

超微晶金刚石/氢化非晶碳复合薄膜由三种不同的成分组成;超纳米晶金刚石微晶、氢化无定形碳以及它们之间的晶界。由于晶界包含大量悬空键和不饱和键,它们将成为载流子陷阱中心在可能的应用(如紫外光电探测器)中降低器件性能的原因。我们通过几种光谱技术通过实验证明氢原子优先结合在晶界并终止悬空键。XPS 测量无法检测到薄膜中 sp^2- 和 sp^3- 杂化碳的定量跃迁,导致 sp^3 含量为 55-59%。另一方面,FT-IR 和 NEXAFS 肯定表现出某些碳杂化量的一些变化。前者通过额外的氢化证实了从 sp^2 到 sp^3 烃的转化约 10%,后者代表了 {\pi}* C{\equiv}C 和 {\pi}* C=C 的化学构型变化到 {\sigma}* CH。这些结果可能是晶界局部氢的证据,它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。前者通过额外的氢化证实了从 sp^2 到 sp^3 烃的转化约 10%,后者代表了 {\pi}* C{\equiv}C 和 {\pi}* C=C 的化学构型变化到 {\sigma}* CH。这些结果可能是晶界局部氢的证据,它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。前者通过额外的氢化证实了从 sp^2 到 sp^3 烃的转化约 10%,后者代表了 {\pi}* C{\equiv}C 和 {\pi}* C=C 的化学构型变化到 {\sigma}* CH。这些结果可能是晶界局部氢的证据,它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。后者表示从 {\pi}* C{\equiv}C 和 {\pi}* C=C 到 {\sigma}* CH 的化学构型变化。这些结果可能是晶界局部氢的证据,它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。后者表示从 {\pi}* C{\equiv}C 和 {\pi}* C=C 到 {\sigma}* CH 的化学构型变化。这些结果可能是晶界局部氢的证据,它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。它在终止悬空键和不饱和键中起作用,并且它们与先前研究中研究的薄膜的光学和电学性质相关。我们对氢化效应的光谱研究以及对光学和电学特性的讨论证实,氢化可以成为上述传感应用中增强光伏性能的有效工具。
更新日期:2020-11-01
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