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nanolithography toolbox—Simplifying the design complexity of microfluidic chips
Journal of Vacuum Science & Technology B ( IF 1.4 ) Pub Date : 2020-11-01 , DOI: 10.1116/6.0000562
Haoqing Zhang 1 , Jan Pekárek 1, 2, 3 , Jianguo Feng 1 , Xiaocheng Liu 1 , Huanan Li 1 , Hanliang Zhu 1 , Vojtěch Svatoš 3 , Imrich Gablech 3 , Pavel Podešva 1 , Sheng Ni 4 , Levent Yobas 4 , Pavel Neužil 1, 2, 3
Affiliation  

Microfluidic devices typically require complex shapes such as funnels, spirals, splitters, channels with different widths, or customized objects of arbitrary complexity with a smooth transition between these elements. Device layouts are generally designed by software developed for the design of integrated circuits or by general computer-aided design drawing tools. Both methods have their limitations, making these tasks time consuming. Here, a script-based, time-effective method to generate the layout of various microfluidic chips with complex geometries is presented. The present work uses the nanolithography toolbox (NT), a platform-independent software package, which employs parameterized fundamental blocks (cells) to create microscale and nanoscale structures. In order to demonstrate the functionality and efficiency of the NT, a few classical microfluidic devices were designed using the NT and then fabricated in glass/silicon using standard microfabrication techniques and in poly(dimethylsiloxane) using soft lithography as well as more complex techniques used for flow-through calorimetry. In addition, the functionality of a few of the fabricated devices was tested. The powerful method proposed allows the creation of microfluidic devices with complex layouts in an easy way, simplifying the design process and improving design efficiency. Thus, it holds great potential for broad applications in microfluidic device design.

中文翻译:

纳米光刻工具箱——简化微流控芯片的设计复杂性

微流体设备通常需要复杂的形状,例如漏斗、螺旋、分流器、不同宽度的通道,或在这些元素之间具有平滑过渡的任意复杂度的定制对象。器件布局通常由为集成电路设计开发的软件或由通用计算机辅助设计绘图工具设计。这两种方法都有其局限性,使得这些任务非常耗时。在这里,提出了一种基于脚本的、时间有效的方法来生成具有复杂几何形状的各种微流控芯片的布局。目前的工作使用纳米光刻工具箱 (NT),这是一个独立于平台的软件包,它采用参数化的基本块(单元)来创建微米级和纳米级结构。为了演示 NT 的功能和效率,一些经典的微流体装置是使用 NT 设计的,然后使用标准微加工技术在玻璃/硅中制造,使用软光刻技术在聚(二甲基硅氧烷)中制造,以及用于流通量热法的更复杂技术。此外,还测试了一些制造的设备的功能。提出的强大方法允许以简单的方式创建具有复杂布局的微流体设备,简化设计过程并提高设计效率。因此,它在微流体装置设计中具有广泛应用的巨大潜力。此外,还测试了一些制造的设备的功能。提出的强大方法允许以简单的方式创建具有复杂布局的微流体设备,简化设计过程并提高设计效率。因此,它在微流体装置设计中具有广泛应用的巨大潜力。此外,还测试了一些制造的设备的功能。提出的强大方法允许以简单的方式创建具有复杂布局的微流体设备,简化设计过程并提高设计效率。因此,它在微流体装置设计中具有广泛应用的巨大潜力。
更新日期:2020-11-01
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