Abstract

Antireflection layers are an important part of the sensitive elements of high performance single photon detectors. We have obtained amorphous silicon dioxide films by electron-beam sputtering on Al₂O₃, AlN, Si substrates as well as CeB₆, LaB₆, and W coatings. The elemental composition, microstructure and surface roughness, as well as optical characteristics of the samples obtained under various conditions of spraying are investigated. It is shown that SiO₂/Al₂O₃ and SiO₂/AlN two-layer coatings can provide high detection efficiency under registration of the radiation in the near IR region, which is used in telecommunication systems and devices for quantum information processing.

中文翻译：

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二氧化硅膜用作热电单光子探测器的抗反射涂层

摘要

抗反射层是高性能单光子探测器敏感元件的重要组成部分。我们已经通过电子束溅射在Al ₂ O ₃，AlN，Si衬底以及CeB ₆，LaB ₆和W涂层上获得了非晶态二氧化硅薄膜。研究了在各种喷涂条件下获得的样品的元素组成，微观结构和表面粗糙度以及光学特性。结果表明，SiO ₂ / Al ₂ O ₃和SiO ₂/ AlN两层涂层可以在近红外区域的辐射配准下提供高检测效率，该涂层用于电信系统和量子信息处理设备。