ABSTRACT

Hydrogenated diamond-like carbon (DLC: H) films were successfully fabricated on the surface of 13Cr super martensitic stainless steel by high-pulsed power chemical vapour deposition. The mechanical and tribological properties of the films related to the substrate bias voltages were investigated. The results showed that the surface hardness and tribological properties of the substrate after DLC film deposition were improved. The DLC films became dense, the grain size and roughness reduced, and the deposition rates increased as the bias voltage increased. In addition, the dense DLC films directly led to high nanohardness and elastic modulus. The H content decreased with an increase in the bias voltage, which may be the primary reason for nanohardness and modulus enhancement. Due to the relatively high H/E* and H ²/E*³ ratios of films corresponded to high elastic strain and plastic deformation resistances reduced the wear loss, and the localized graphitization on the surface provided solid lubrication.

摘要

通过高脉冲功率化学气相沉积法在13Cr超级马氏体不锈钢表面成功制备了氢化类金刚石碳（DLC：H）膜。研究了与衬底偏压有关的薄膜的机械和摩擦学性能。结果表明，DLC膜沉积后基材的表面硬度和摩擦学性能得到改善。随着偏置电压的增加，DLC膜变得致密，晶粒尺寸和粗糙度减小，并且沉积速率增加。另外，致密的DLC膜直接导致高纳米硬度和弹性模量。H含量随偏置电压的增加而降低，这可能是纳米硬度和模量提高的主要原因。由于H /较高薄膜的E *和H ² / E * ³比对应于高弹性应变，抗塑性变形性降低了磨损损耗，并且表面上的局部石墨化提供了固体润滑。