In this work, we combine Lithium Niobate on insulator with a silicon nitride layer to form strip-loaded waveguides that can take advantage of the strong nonlinear optical coefficients of lithium niobate and of the high refractive contrast and ease of processing of silicon nitride. We describe the design and fabrication of a Fabry-Perot cavity formed by Distributed Bragg Reflectors. We discuss the design trade-offs implicit in the realisation of such microcavities of this nature and demonstrate an experimental quality factor of 2300, which is to our knowledge, the highest experimentally reported result for such type of waveguide based Fabry-Perot cavity.

中文翻译：

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基于带载波导的铌酸锂法布里-珀罗微腔

在这项工作中，我们将绝缘体上的铌酸锂与氮化硅层结合在一起，形成带状加载的波导，该带载波导可以利用铌酸锂的强非线性光学系数和高折光率以及氮化硅的易加工性。我们描述了由分布式布拉格反射器形成的法布里-珀罗腔的设计和制造。我们讨论了实现这种性质的微腔所隐含的设计权衡，并证明了2300的实验品质因数，据我们所知，这是此类基于波导的Fabry-Perot腔的最高实验报告结果。