We report the deposition and characterization of calcium lead titanate (PCT) thin films for pyroelectric detectors. PCT films of thicknesses ranging from ~250 to 400 nm were deposited on both silicon and Si/SiN/Ti/Au substrates at 13 mTorr pressure by 200W radio frequency sputtering in an Ar + O₂ environment. Substrates were kept at variable temperatures during the deposition. The PCT films were annealed at various temperatures in an O₂ environment for 15 min. X-ray diffraction results confirm the polycrystalline nature of these films. Energy dispersive spectroscopy function of scanning electron microscope showed that the films are stoichiometric (Ca_0.43Pb_0.57) TiO₃ (Ca/Ti = 0.5, Pb/Ti = 0.66). Temperature dependence of capacitance, pyroelectric current, and pyroelectric coefficient was investigated for different PCT films. Our results show that films deposited at 550 °C and 600 °C demonstrate better quality and larger values of the pyroelectric coefficient. On the other hand, the capacitance fabricated on the PCT films at 550 °C showed the highest value of pyroelectric current and pyroelectric coefficient which were 14 pA and at 30 °C was ~2 µC/m²K respectively at a higher temperature. In addition, we used density functional theory to determine the atomic and band structure, real and imaginary parts of dielectric constant and refractive index, and absorption and reflection constants with energy.

中文翻译：

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溅射钙钛酸铅薄膜的热释电性能

我们报告了热释电探测器的钛酸钙铅（PCT）薄膜的沉积和表征。在Ar + O ₂环境中，通过200W射频溅射，在13 mTorr压力下将厚度约为250至400 nm的PCT膜沉积在硅和Si / SiN / Ti / Au衬底上。在沉积过程中将基板保持在可变温度下。将PCT薄膜在O ₂环境中的各种温度下退火15分钟。X射线衍射结果证实了这些膜的多晶性质。扫描电子显微镜的能量色散光谱功能表明该膜是化学计量的（Ca _0.43 Pb _0.57）TiO ₃（Ca / Ti = 0.5，Pb / Ti = 0.66）。研究了不同PCT薄膜的电容，热释电电流和热释电系数与温度的关系。我们的结果表明，在550°C和600°C下沉积的薄膜表现出更好的质量和更大的热电系数值。在另一方面，电容制造在在550的PCT膜℃下显示出热电电流和热电系数分别为14 PA的最高值，并在30℃下为〜2μC/米² ķ分别在较高温度下。此外，我们使用密度泛函理论来确定原子和能带结构，介电常数和折射率的实部和虚部以及带能量的吸收和反射常数。