In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) sensors. However, controversy remians about the resolution limits of mode-localised sensors. This paper asks two questions of the community: what are the resolution limits of the mode-localised sensors, and can the resolution improvement be obtained using mode-localised sensing? To answer these questions, we report a series of resolution models of mode-localised sensors. We conclude that mode-localised sensing can realise a higher measuring resolution by orders of magnitude when more than three resonators are weakly coupled, and this will lay the theoretical foundation for a breakthrough for the MEMS sensors industry.

近年来，已经成功地利用了弱耦合谐振器的模式定位现象来提高微机电系统（MEMS）传感器的灵敏度。然而，关于模式定位传感器的分辨率极限的争议仍然存在。本文向社区提出了两个问题：模式定位传感器的分辨率极限是多少？使用模式定位传感能否提高分辨率？为了回答这些问题，我们报告了一系列模式定位传感器的分辨率模型。我们得出的结论是，当三个以上的谐振器被弱耦合时，模式局部感测可以实现一个数量级的更高测量分辨率，这将为MEMS传感器行业的突破奠定理论基础。