Abstract We present an optical fiber gas pressure sensor based on two cascaded Fabry-Perot interferometer cavities, one is a section of capillary tube spliced with single mode fiber at its two ends and the other consists of a pair of in-fiber reflection mirrors inscribed by use of femtosecond laser micromachining. The cavity length difference of the two Fabry-Perot interferometers can be precisely controlled to achieve an extremely large sensitivity when vernier effect is utilized. The pressure sensitivity obtained is ~303.65 pm/kPa. Moreover, the temperature cross-sensitivity of the device achieved is as low as 0.124 kPa/°C. The device is flexible in design, easy in fabrication, convenient in operation and has high potential in medical, environmental monitoring and other industrial applications.

中文翻译：

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基于游标效应的放大倍数可控的超灵敏气体压力传感器

摘要 我们提出了一种基于两个级联法布里-珀罗干涉仪腔的光纤气体压力传感器，一个是两端拼接单模光纤的一段毛细管，另一个是由一对内接的光纤反射镜组成飞秒激光微加工技术的应用。利用游标效应，可以精确控制两台法布里-珀罗干涉仪的腔长差，达到极高的灵敏度。获得的压力灵敏度为 ~303.65 pm/kPa。此外，该器件的温度交叉敏感性低至 0.124 kPa/°C。该装置设计灵活、制作容易、操作方便，在医疗、环境监测等工业应用中具有很大的应用潜力。