This paper presents the design, fabrication and characterization of a novel micro electromagnetic linear actuator, which exhibits two highlights: slider self-alignment and self-attachment capability. Such characters are realized by deliberately utilizing the attractive force between the permanent magnets (Nd₂Fe₁₄B) of the slider and nickel ferromagnetic cores embedded in the stator. Actuation is achieved via thrust from both meander micro copper coils and nickel ferromagnetic cores in the stator to the permanent magnets of the slider. The actuator is fabricated by the micro machining process. The surface magnetic property of the slider is simulated and experimentally measured. The eccentric experiment is conducted to evaluate the attraction force between the slider and stator, which proves its self-attachment characteristics. The device is actuated by two-phase sinusoidal currents with a 0.5 A amplitude under an open-loop condition. The slider demonstrates self-alignment movements before moving forward when misalignment occurs. The actuation experimental results show that the average velocity of the slider reaches 4 mm s^–1 and 12 mm s^–1 at 10 Hz and 30 Hz, respectively. Further increasing the input frequency to 50 Hz leads to the unsteady actuation state, indicating the actuator bandwidth is less than 50 Hz under an open-loop condition.

本文介绍了一种新型的微电磁线性致动器的设计，制造和特性，该技术具有两个亮点：滑块的自对准和自连接能力。通过故意利用永磁体（Nd ₂ Fe ₁₄B）将滑块和镍铁磁芯嵌入定子。通过从蛇形微型铜线圈和定子中的镍铁磁芯到滑块的永磁体的推力来实现致动。致动器是通过微加工工艺制造的。模拟并实验测量了滑块的表面磁性能。通过进行偏心实验来评估滑块与定子之间的吸引力，从而证明其具有自附着特性。在开环条件下，该器件由振幅为0.5 A的两相正弦电流驱动。发生不对正时，滑块会在向前移动之前演示自对正运动。驱动实验结果表明，滑块的平均速度达到4 mm s ^–1分别在10 Hz和30 Hz时为12 mm s ^–1。将输入频率进一步提高到50 Hz会导致不稳定的致动状态，这表明在开环条件下致动器带宽小于50 Hz。