Numerical modelling of MicroElectroMechanical Systems (MEMS) resonators is still attracting increasing interest from the sensors community especially when the nonlinear regime is activated. Here, the dynamic response of two different types of double-ended tuning fork MEMS resonators is studied both in the linear and nonlinear regimes. A one Degree Of Freedom (1 dof) model able to predict the frequency response of the device is proposed. Geometric and electrostatic nonlinearities are simulated through Finite Elements and Integral Equations, respectively. The total dissipation of the resonator is computed by taking into account both the thermoelastic and the nonlinear fluid contributions. Experimental measurements performed on resonators fabricated in polysilicon and single crystal silicon validate the proposed model showing a very good agreement with theoretical predictions. [2020-0240]

中文翻译：

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MEMS 谐振器中非线性的数值建模

微机电系统 (MEMS) 谐振器的数值建模仍然引起传感器界越来越多的兴趣，尤其是在激活非线性状态时。在这里，研究了两种不同类型的双端音叉 MEMS 谐振器在线性和非线性状态下的动态响应。提出了一种能够预测设备频率响应的单自由度 (1 dof) 模型。几何非线性和静电非线性分别通过有限元和积分方程进行模拟。谐振器的总耗散是通过考虑热弹性和非线性流体贡献来计算的。在多晶硅和单晶硅制造的谐振器上进行的实验测量验证了所提出的模型，显示出与理论预测非常吻合。[2020-0240]