This article reports Lithium Niobate (LN) based shear horizontal (SH0) resonators utilizing suspended and solidly mounted structures for radio frequency (RF) applications. The solidly mounted SH0 structure (also termed guided SH0 structure) is advantageous in obtaining reduced temperature coefficient of frequency (TCF), reduced high frequency overtone spurious responses, and improved power handling. The demonstrated solidly mounted guided SH0 resonators exhibit a mechanical Q as high as 1316 around 950 MHz, and electromechanical coupling factor ( ${k} _{\mathrm {t}}^{\mathrm {2}}$ ) of around 21.8 % - resulting in a figure of merit ( $\mathrm {FoM}=k_{\mathrm {t}}^{\mathrm {2}}\cdot \mathrm {Q}$ ) of 288.

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用于射频应用的 X-Cut 铌酸锂基剪切水平谐振器

本文报告了基于铌酸锂 (LN) 的剪切水平 (SH0) 谐振器，该谐振器利用悬浮和牢固安装的结构用于射频 (RF) 应用。牢固安装的 SH0 结构（也称为引导式 SH0 结构）有利于降低频率温度系数 (TCF)、减少高频泛音杂散响应和提高功率处理能力。演示的牢固安装的引导 SH0 谐振器在 950 MHz 附近表现出高达 1316 的机械 Q，以及机电耦合因子（ ${k} _{\mathrm {t}}^{\mathrm {2}}$ ) 大约 21.8 % - 导致品质因数 ( $\mathrm {FoM}=k_{\mathrm {t}}^{\mathrm {2}}\cdot \mathrm {Q}$ ) 的 288。