Ultraviolet (UV) assisted printing has emerged as a promising additive manufacturing (AM) technology, which puts UV light sources with focused emission in high demand. Unfortunately, current ultraviolet light-emitting diodes (UV LEDs) are not able to provide adequately focused UV emission required for printing. Thus, a UV LED package with focused UV emission was proposed and fabricated using microelectromechanical system (MEMS) technology in this study. An optical model of the UV LED package with focused UV emission was developed. Based on the designed model, a silicon reflector stacked on another was achieved. By assembling the stacked silicon reflector and hemispherical quartz lenses, the UV LED package with focused UV emission was successfully achieved. A narrow beam with a beam angle of 16° between half maximum intensity was achieved, while the intensity at 0° was greater than 1000 mW/cm2 at the focal point. The UV LED curing system using two focused UV LED packages was successfully developed based on the optical simulation results. Polymer pillars were fabricated by instantaneous UV curing process with synchronized UV curable polymer jetting process in one shot, and micro-scale polymer pillars with a diameter of $20~\mu \text{m}$ were achieved. Thanks to the high intensity and focused UV emission, polymer pillars can be formed in as little as 100 ms. 13600 polymer pillars were printed on a silicon wafer with uniform diameter and geometry in a single dispensing cycle. The UV LED assisted printing platform was successfully demonstrated for fabrication of micro-scale 3D structures in a fast speed with smooth printing process. [2020-0303]

中文翻译：

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用于制造微型聚合物柱的 UV LED 辅助打印平台

紫外线 (UV) 辅助打印已成为一种很有前途的增材制造 (AM) 技术，它对具有聚焦发射的紫外线光源的需求量很大。不幸的是，当前的紫外发光二极管 (UV LED) 无法提供印刷所需的充分聚焦的紫外发射。因此，在本研究中提出并使用微机电系统 (MEMS) 技术制造了一种具有聚焦紫外线发射的 UV LED 封装。开发了具有聚焦紫外线发射的 UV LED 封装的光学模型。基于设计的模型，实现了堆叠在另一个上的硅反射器。通过组装堆叠的硅反射器和半球形石英透镜，成功实现了具有聚焦紫外线发射的 UV LED 封装。获得了半最大强度之间光束角为 16° 的窄光束，而0°处的强度在焦点处大于1000 mW/cm2。基于光学模拟结果，成功开发了使用两个聚焦 UV LED 封装的 UV LED 固化系统。聚合物柱通过瞬时UV固化工艺和同步UV固化聚合物喷射工艺一次性制造，获得了直径为$20~\mu\text{m}$的微型聚合物柱。由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 基于光学模拟结果，成功开发了使用两个聚焦 UV LED 封装的 UV LED 固化系统。聚合物柱通过瞬时UV固化工艺和同步UV固化聚合物喷射工艺一次性制造，获得了直径为$20~\mu\text{m}$的微型聚合物柱。由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 基于光学模拟结果，成功开发了使用两个聚焦 UV LED 封装的 UV LED 固化系统。聚合物柱通过瞬时UV固化工艺和同步UV固化聚合物喷射工艺一次性制造，获得了直径为$20~\mu\text{m}$的微型聚合物柱。由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 聚合物柱通过瞬时UV固化工艺和同步UV固化聚合物喷射工艺一次性制造，获得了直径为$20~\mu\text{m}$的微型聚合物柱。由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 聚合物柱通过瞬时UV固化工艺和同步UV固化聚合物喷射工艺一次性制造，获得了直径为$20~\mu\text{m}$的微型聚合物柱。由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303] 由于高强度和聚焦的紫外线发射，聚合物柱可以在短短 100 毫秒内形成。在单个点胶周期中，13600 个聚合物柱被印刷在具有均匀直径和几何形状的硅晶片上。UV LED辅助打印平台成功地展示了在快速、流畅的打印过程中制造微型3D结构的能力。[2020-0303]