This paper describes a novel, semiautomated design methodology based on a genetic algorithm (GA) using freeform geometries for microelectromechanical systems (MEMS) devices. The proposed method can design MEMS devices comprising freeform geometries and optimize such MEMS devices to provide high sensitivity, large bandwidth, and large fabrication tolerances. The proposed method does not require much computation time or memory. The use of freeform geometries allows more degrees of freedom in the design process, improving the diversity and performance of MEMS devices. A MEMS accelerometer comprising a mechanical motion amplifier is presented to demonstrate the effectiveness of the design approach. Experimental results show an improvement in the product of sensitivity and bandwidth by 100% and a sensitivity improvement by 141% compared to the case of a device designed with conventional orthogonal shapes. Furthermore, excellent immunities to fabrication tolerance and parameter mismatch are achieved.

本文介绍了一种基于遗传算法 (GA) 的新型半自动设计方法，该方法使用微机电系统 (MEMS) 设备的自由几何形状。所提出的方法可以设计包括自由形状几何形状的MEMS器件并优化此类MEMS器件以提供高灵敏度、大带宽和大制造公差。所提出的方法不需要太多的计算时间或内存。使用自由几何形状可以在设计过程中提供更多自由度，从而提高 MEMS 器件的多样性和性能。提出了一个包含机械运动放大器的 MEMS 加速度计，以证明该设计方法的有效性。实验结果表明，与使用传统正交形状设计的设备相比，灵敏度和带宽的乘积提高了 100%，灵敏度提高了 141%。此外，还实现了对制造公差和参数失配的出色免疫力。