Gas sensing technology is becoming increasingly important in environmental monitoring, medical diagnostics, and industrial safety. Among various types of gas sensors, FET-type gas sensors are increasingly attracting attention due to their miniaturized size, low power consumption, high reliability, and good compatibility with CMOS technology. Therefore, it would be helpful to review how FET-type gas sensors have evolved and how recent trends have been. In this paper, we review the technologies of FET-type gas sensors, focusing on TFT, catalytic metal-gate FET, suspended-gate FET, capacitively-coupled FET, and horizontal floating-gate FET gas sensors. The device structure and operating principle of each type of FET-type gas sensor are explained and then the advantages and disadvantages are discussed. We also review their sensing properties such as sensitivity, selectivity and response/recovery speeds, and the methods to enhance their sensing performances. Finally, we introduce a pre-bias scheme that effectively improves the sensing characteristics of the FET-type gas sensor and its effects, and discuss the key characteristics and development direction of the FET-type gas sensor embedded with a practical low-power micro-heater.

气体传感技术在环境监测，医学诊断和工业安全中正变得越来越重要。在各种类型的气体传感器中，FET型气体传感器由于其尺寸小，功耗低，可靠性高以及与CMOS技术的良好兼容性而日益受到关注。因此，回顾一下FET型气体传感器如何发展以及最近的趋势如何将很有帮助。在本文中，我们将回顾FET型气体传感器的技术，重点是TFT，催化金属栅FET，悬浮栅FET，电容耦合FET和水平浮栅FET气体传感器。介绍了每种FET型气体传感器的器件结构和工作原理，然后讨论了其优缺点。我们还将审查它们的感测特性，例如灵敏度，选择性和响应/恢复速度，以及增强其感测性能的方法。最后，我们介绍了一种可有效改善FET型气体传感器的感测特性及其影响的预偏置方案，并讨论了嵌入实用的低功耗微传感器的FET型气体传感器的关键特性和发展方向。加热器。