The possibility of the development of MEMS devices based on the tunable ferroelectric film Ba _0.8 Sr _0.2 O ₃ properties under uniaxial deformation was studied theoretically. The thermodynamic model of the phase transitions for the film under uniaxial stress was constructed. The behavior of the material constants for the film in various phase states was investigated. The propagation properties of the surface acoustic wave (SAW) under the uniaxial stress were studied for the film located on the single-crystal silicon substrate. It was shown that the SAW resonance frequency changes within 3 MHz for the frequency of 274 MHz, and 9 MHz for the frequency of 512 MHz.

中文翻译：

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单轴应力下钛酸锶钡铁电薄膜的可调机电性能

从理论上研究了基于可调谐铁电薄膜Ba _0.8 Sr _0.2 O ₃特性的单轴变形下MEMS器件开发的可能性。建立了单轴应力作用下薄膜相变的热力学模型。研究了膜在各种相态下的材料常数的行为。研究了位于单晶硅衬底上的薄膜在单轴应力下的表面声波（SAW）的传播特性。结果表明，对于274 MHz的频率，SAW谐振频率在3 MHz内变化，对于512 MHz的频率，SAW谐振频率在9 MHz内变化。