Fully integrated voltage regulation, while important for a number of applications, is challenging due to the limitations of on-chip passive components, particularly inductors. This work demonstrates a new direction in passive-component integration through the design and implementation of a silicon-integrated merged- $LC$ resonator, used in a resonant switched-capacitor voltage regulator. The merged- $LC$ resonator combines flying capacitance and inductance into a single structure to reduce ac resistive losses, achieving higher efficiency and power density. The voltage regulator is implemented in a 0.18- $\mu \text{m}$ CMOS process and achieves 85.5% efficiency at 0.47 W without off-chip passive components. Light-load efficiency is extended through the use of OFF-time modulation (OTM); the design achieves <40-mV under-/over-shoot during 2–50-mA/4- $\mu \text{s}$ load transients.

中文翻译：

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具有双相合并 LC 谐振器的单片谐振开关电容器稳压器

完全集成的电压调节虽然对许多应用很重要，但由于片上无源元件（尤其是电感器）的限制而具有挑战性。这项工作通过设计和实现硅集成合并- $LC$ 谐振器，用于谐振开关电容稳压器。合并的—— $LC$ 谐振器将飞电容和电感结合到一个结构中，以减少交流电阻损耗，实现更高的效率和功率密度。电压调节器采用 0.18- $\mu \text{m}$ CMOS 工艺，在 0.47 W 时实现 85.5% 的效率，无需片外无源元件。通过使用关断时间调制 (OTM) 提高了轻载效率；该设计在 2–50-mA/4- 期间实现了 <40-mV 下/过冲 $\mu \text{s}$ 负载瞬变。