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Experimental Demonstration of Charge-Balanced GaN Super-Heterojunction Schottky Barrier Diode Capable of 2.8 kV Switching
IEEE Electron Device Letters ( IF 4.9 ) Pub Date : 2020-12-01 , DOI: 10.1109/led.2020.3029619
Sang-Woo Han , Jianan Song , Sang Ha Yoo , Ziguang Ma , Robert M. Lavelle , David W. Snyder , Joan M. Redwing , Thomas N. Jackson , Rongming Chu

This letter reports an experimental demonstration of charge-balanced GaN super-heterojunction Schottky barrier diodes (SHJ-SBDs). Charge balance between the n-type delta-doping and the p-type doping was achieved by adjusting the thickness of the pGaN. This device structure enabled scaling of breakdown voltage to over 3 kV, and dynamic switching up to 2.8 kV without using any field-plate.

中文翻译:

具有 2.8 kV 开关能力的电荷平衡 GaN 超异质结肖特基势垒二极管的实验演示

这封信报告了电荷平衡 GaN 超异质结肖特基势垒二极管 (SHJ-SBD) 的实验演示。通过调整 pGaN 的厚度来实现 n 型 delta 掺杂和 p 型掺杂之间的电荷平衡。这种器件结构能够将击穿电压扩展到 3 kV 以上,并在不使用任何场板的情况下动态切换到 2.8 kV。
更新日期:2020-12-01
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