Abstract A high-power laser stable surface-enhanced Raman spectroscopy (SERS) substrate which can provide a SERS enhancement factor greater than 1012 was fabricated as an Ag metalized nanoimprinted glass nanohole array. A vitreous carbon (VC) nanopost stamp with a height of 82 nm, a pitch of 390 nm, and a nanopost diameter of 187 nm, was fabricated by carbonization of a replicated furan precursor from a silicon master pattern, and a glass nanohole pattern was imprinted using the VC nanostamp at a temperature of 690 °C and compression pressure of 0.6 MPa. An electromagnetic field analysis using the rigorous coupled-wave analysis was conducted to optimize the Ag layer to examine the SERS enhancement factor from glass SERS (GL-SERS) substrate. For comparison, a polymer SERS (PL-SERS) substrate was also fabricated by the deposition of the Ag layer on a UV nanoimprinted polymer nanohole pattern using the same VC nanostamp. A SERS enhancement factor (EF) of 107 was obtained from both GL- and PL-SERS substrates at a laser irradiation power of 100 mW. However, a SERS-EF of 1012 was achieved using the GL-SERS substrate with a laser irradiation power of 200 mW, however, the PL-SERS substrate was unable to withstand this irradiance.

中文翻译：

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用于高功率激光稳定表面增强拉曼光谱衬底的玻璃纳米压印等离子体纳米结构

摘要 制备了一种高功率激光稳定表面增强拉曼光谱 (SERS) 衬底，该衬底可以提供大于 1012 的 SERS 增强因子，制成 Ag 金属化纳米压印玻璃纳米孔阵列。高度为 82 nm、间距为 390 nm、纳米柱直径为 187 nm 的玻璃碳 (VC) 纳米柱印章是通过碳化硅母模复制的呋喃前驱体制备的，玻璃纳米孔图案是使用 VC 纳米印章在 690 °C 的温度和 0.6 MPa 的压缩压力下进行压印。使用严格的耦合波分析进行电磁场分析以优化 Ag 层，以检查来自玻璃 SERS (GL-SERS) 基板的 SERS 增强因子。为了比较，聚合物 SERS (PL-SERS) 基板也是通过使用相同的 VC 纳米印章在 UV 纳米压印聚合物纳米孔图案上沉积银层来制造的。在 100 mW 的激光照射功率下，从 GL-SERS 和 PL-SERS 基板获得了 107 的 SERS 增强因子 (EF)。然而，使用具有 200 mW 激光照射功率的 GL-SERS 基板实现了 1012 的 SERS-EF，然而，PL-SERS 基板无法承受这种辐照。