In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was analyzed using a mode split approach, having a drive resonant frequency of , with the x-sense, y-sense, and z-sense being 25,625, 25,886, and 25,806 Hz, respectively. Drive-mode analysis was carried out and a maximum drive-displacement of was computed for a harmonic drive force. Mechanical sensitivity was computed at input angular rate while the scale factor for roll, pitch, and yaw was computed to be 0.014, 0.011, and 0.013 nm/dps, respectively.

中文翻译：

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使用COMSOL Multiphysics对单驱动，三轴MEMS陀螺仪进行灵敏度分析

在本文中，提出了一种基于COMSOL Multiphysics的方法来评估微机电系统（MEMS）陀螺仪。通过与分析结果和Matlab / Simulink分析结果进行比较，成功验证了已建立的有限元分析（FEA）模型。使用模式分割方法分析了简化的单驱动，三轴MEMS陀螺仪，其驱动共振频率为，x感，y感和z感分别为25,625、25,886和25,806 Hz。 。进行了驱动模式分析，并计算了谐波驱动力的最大驱动位移。在输入角速率下计算机械灵敏度，而滚动，俯仰和偏航的比例因子分别计算为0.014、0.011和0.013 nm / dps。