Josephson junctions are the building blocks of superconducting electronics, with well-established applications in precision metrology and quantum computing. Fabricating a Josephson junction has been a resource-intensive and multistep procedure, involving lithography and wet-processing, which are not compatible with many applications. Here, we introduce a fully additive direct-write approach, where a scanning electron microscope can print substrate-conformal Josephson devices in a matter of minutes, requiring no additional processing. The junctions are made entirely by electron-beam-induced deposition (EBID) of tungsten carbide. We utilize EBID-tunable material properties to write, in one go, full proximity junctions with superconducting electrodes and metallic weak links and tailor their Josephson coupling. The Josephson behavior of these junctions is established and characterized by their microwave-induced Shapiro response and field-dependent transport. Our efforts provide a versatile and nondestructive alternative to conventional nanofabrication and can be expanded to print three-dimensional superconducting sensor arrays and quantum networks.

中文翻译：

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约瑟夫森结在扫描电子显微镜中的直接写入印刷

约瑟夫逊结是超导电子学的基础，在精密计量学和量子计算中已得到广泛应用。制造约瑟夫森结一直是资源密集的多步骤过程，涉及光刻和湿法处理，与许多应用程序不兼容。在这里，我们介绍了一种完全累加的直接写入方法，其中扫描电子显微镜可以在几分钟内打印出保形的约瑟夫森器件，而无需其他处理。结完全由碳化钨的电子束诱导沉积（EBID）制成。我们利用EBID可调材料的特性，一次性编写具有超导电极和金属弱连接的全接近结，并定制其约瑟夫森耦合。这些交界处的约瑟夫森行为已建立，并以其微波诱导的夏皮罗响应和场依赖运输为特征。我们的努力为传统的纳米加工提供了一种通用且无损的替代方法，并且可以扩展到打印三维超导传感器阵列和量子网络。