Abstract In this article, nitrogen (N2) doped diamond-like carbon (N-DLC) coatings are deposited by Atmospheric pressure chemical vapor deposition (APCVD) technique at varying N2 flow rates and are investigated by scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy, nanoindentation (NI) and nano scratch (NS) characterization. The wear rate (WR) and coefficient of friction (μ) of the N-DLC thin films increase from 1.32 x 10-4 to 3.11 x 10-4 μm2 and 0.05 to 0.15 with the increase of load from 40 to 70 mN at 70 sccm N2 flow rate. The results showed that there is a significant improvement in the tribological and mechanical properties of the APCVD synthesized DLC film as compare to the other PVD deposited DLC film.

中文翻译：

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氮气 (N2) 流速对类金刚石碳 (DLC) 薄膜的摩擦学、结构和机械性能的影响

摘要 在本文中，通过常压化学气相沉积 (APCVD) 技术在不同的 N2 流速下沉积氮 (N2) 掺杂的类金刚石碳 (N-DLC) 涂层，并通过扫描电子显微镜 (SEM)、原子力显微镜 (AFM)、拉曼光谱、纳米压痕 (NI) 和纳米划痕 (NS) 表征。N-DLC 薄膜的磨损率 (WR) 和摩擦系数 (μ) 从 1.32 x 10-4 增加到 3.11 x 10-4 μm2 和 0.05 到 0.15，在 70 时负载从 40 增加到 70 mN sccm N2 流量。结果表明，与其他 PVD ​​沉积的 DLC 膜相比，APCVD 合成的 DLC 膜的摩擦学和机械性能有显着改善。