In this article, a novel optical microelectromechanical systems (MEMS) accelerometer sensor based on a one-dimensional photonic crystals wavelength modulation system is proposed with a focus on optimizing the sensitivity of the high-frequency device. The proposed accelerometer consists of a sensitive optical system and a high-frequency mechanical structure, which have been studied by rigorous coupled wave analysis (RCWA) and finite element analysis (FEA). A very large bandwidth, excellent sensitivity to optical sensing and considerable resolution of the high-frequency device of the proposed sensor provide several attractive performance aspects. Through a rigorous theoretical argument, the following results are demonstrated: a photonic band gap (PBG) from 1.1 to 2.8 $\mu $ m, a bandwidth from 0 to 20 kHz, an optical system sensitivity of to 3.38, and an accelerometer sensitivity of 2.06 nm/g, with a measurement range of ± 217 g and a resolution of 4.850 mg. In view of these optimized performances, the proposed MEMS accelerometer can be used for all kinds of high frequency applications.

中文翻译：

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基于一维光子晶体波长调制系统提高高频光学MEMS加速度计灵敏度的建议

在本文中，提出了一种基于一维光子晶体波长调制系统的新型光学微机电系统 (MEMS) 加速度计传感器，重点是优化高频器件的灵敏度。所提出的加速度计由一个灵敏的光学系统和一个高频机械结构组成，这些结构已经通过严格的耦合波分析（RCWA）和有限元分析（FEA）进行了研究。所提出的传感器的非常大的带宽、对光学传感的出色灵敏度和相当大的分辨率提供了几个有吸引力的性能方面。通过严格的理论论证，证明了以下结果：光子带隙 (PBG) 从 1.1 到 2.8 $\mu $ m，从 0 到 20 kHz 的带宽，到 3.38 的光学系统灵敏度，加速度计灵敏度为2.06 nm/g，测量范围为±217 g，分辨率为4.850 mg。鉴于这些优化的性能，所提出的 MEMS 加速度计可用于各种高频应用。