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Identification of geometric parameters influencing the impedance sensitivity of piezoelectric mass sensors
IEEE Sensors Journal ( IF 4.3 ) Pub Date : 2020-12-15 , DOI: 10.1109/jsen.2020.3011878 Jian Zhao , Yu Huang , Xin Wen , Shumin Zhang , Pengbo Liu
IEEE Sensors Journal ( IF 4.3 ) Pub Date : 2020-12-15 , DOI: 10.1109/jsen.2020.3011878 Jian Zhao , Yu Huang , Xin Wen , Shumin Zhang , Pengbo Liu
For resonant mass sensors, a frequency sweeping procedure is usually required to identify the frequency shift in a relative frequency range, which is not suitable for detecting incremental mass. The impedance detection method can measure mass at a fixed frequency. To further explore such sensing mechanism, the main geometrical parameters influencing the impedance sensitivity have been carefully analyzed considering the electro-mechanical coupling effects, and a series of design rules have been proposed for improving sensitivity, e.g. increasing the cantilever length and piezoelectric thickness, which is contrary to the traditional method of minimizing the geometric size for frequency based sensors. Three macro-sized sensors with 21.0 mm, 26.0 mm and 30.0mm long cantilevers are fabricated, and the measured impedance sensitivities are $212.7\Omega $ /mg, $514.8\Omega $ /mg and $737.4\Omega $ /mg that are increasing with the cantilever length, thus validating the design rules on cantilever length. However, the frequency sensitivities are 14.0 Hz/mg, 9.2 Hz/mg, and 7.2 Hz/mg that are decreasing with the cantilever length. Furthermore, the impedance sensitivity is much higher than the frequency sensitivity, and the design map of the sensor is presented as an overall guideline for structure optimization.
中文翻译:
影响压电质量传感器阻抗灵敏度的几何参数的识别
对于共振质量传感器,通常需要扫频程序来识别相对频率范围内的频移,这不适用于检测增量质量。阻抗检测法可以在固定频率下测量质量。为了进一步探索这种传感机制,考虑到机电耦合效应,对影响阻抗灵敏度的主要几何参数进行了仔细分析,并提出了一系列提高灵敏度的设计规则,例如增加悬臂长度和压电厚度。与最小化基于频率的传感器的几何尺寸的传统方法相反。制作了三个具有 21.0 mm、26.0 mm 和 30.0 mm 长悬臂的大尺寸传感器,测量的阻抗灵敏度为 $212.7\欧米茄 $ /毫克, $514.8\欧米茄 $ /mg 和 $737.4\欧米茄 $ /mg 随悬臂长度增加而增加,从而验证悬臂长度的设计规则。然而,频率灵敏度为 14.0 Hz/mg、9.2 Hz/mg 和 7.2 Hz/mg,它们随着悬臂长度的增加而降低。此外,阻抗灵敏度远高于频率灵敏度,传感器的设计图作为结构优化的总体指南。
更新日期:2020-12-15
中文翻译:
影响压电质量传感器阻抗灵敏度的几何参数的识别
对于共振质量传感器,通常需要扫频程序来识别相对频率范围内的频移,这不适用于检测增量质量。阻抗检测法可以在固定频率下测量质量。为了进一步探索这种传感机制,考虑到机电耦合效应,对影响阻抗灵敏度的主要几何参数进行了仔细分析,并提出了一系列提高灵敏度的设计规则,例如增加悬臂长度和压电厚度。与最小化基于频率的传感器的几何尺寸的传统方法相反。制作了三个具有 21.0 mm、26.0 mm 和 30.0 mm 长悬臂的大尺寸传感器,测量的阻抗灵敏度为