Abstract Owing to the direct activation of reactant species, plasma has been playing a role in material synthesis and surface modification since the mid-1970s, especially for the production of nanomaterials. Tungsten nitride with nanostructures has attracted much attention for applications in catalysis and electrocatalysis, due to their noble metal-like properties. In this work, we propose a two-step strategy to prepare tungsten nitride (W2N) layer simply from tungsten sample by means of dense helium and nitrogen plasma treatment. Various surface characterization and cross-section analysis methods have confirmed the formation of W2N nano fuzz structure. After a sequential exposure to helium plasma for 20 minutes and nitrogen plasma for 30 minutes, corresponding to the ion fluence of 8.4 × 1025 m−2 and 2.3 × 1026 m−2 respectively, a nano-fuzzy layer with thickness of ~700 nm has been formed on tungsten surface and the core-shell structured W2N/W nano fibers are around 40 nm in diameter. The synthesis of nanostructured W2N via plasma environment has not only broadened the application of plasma methods, but also offers a facile and universal way for the design of materials with different morphologies and properties.

中文翻译：

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使用浓氦和氮等离子体合成纳米绒毛 W2N 层

摘要 由于反应物物种的直接活化，等离子体自 20 世纪 70 年代中期以来一直在材料合成和表面改性中发挥作用，特别是在纳米材料的生产中。具有纳米结构的氮化钨由于其类似贵金属的特性而在催化和电催化方面的应用引起了广泛关注。在这项工作中，我们提出了一种两步策略，通过浓氦和氮等离子体处理简单地从钨样品制备氮化钨 (W2N) 层。各种表面表征和截面分析方法已经证实了 W2N 纳米绒毛结构的形成。在连续暴露于氦等离子体 20 分钟和氮等离子体 30 分钟后，分别对应于 8.4 × 1025 m-2 和 2.3 × 1026 m-2 的离子注量，在钨表面形成了约 700 nm 厚度的纳米模糊层，核壳结构的 W2N/W 纳米纤维直径约为 40 nm。通过等离子体环境合成纳米结构的 W2N 不仅拓宽了等离子体方法的应用范围，而且为不同形貌和性能的材料的设计提供了一种简便而通用的方法。