Rare-earth transition metal (RE-TM) TbFeCo alloy films with adjustable perpendicular switching field and anisotropy are desirable for the applications in high-density spintronic devices. A series of TbFeCo alloy films are fabricated by sputtering a composite target method. The perpendicular magnetic properties of the ferrimagnetic TbFeCo films are investigated by Extraordinary Hall effect (EHE) measurements. With increasing either sputtering power or gas flow rate film composition shifting from FeCo-rich to Tb-rich side is observed and the orientation of magnetic easy axis changing from in-plane, tilted to out-of-plane direction is witnessed. Pronounced change in magnetic properties particularly the coercivity of TbFeCo films is demonstrated, in line with the increased Tb-to-FeCo ratio of the alloy films. It shows TbFeCo films with desirable coercivity can be achieved by proper combination of sputtering power and flow rate. Our work provides an efficient way in tuning the PMA of the sputtered TbFeCo films during the growth and may be used as guidance for designing TbFeCo-based spintronic devices.

中文翻译：

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通过非凡的霍尔效应测量评估具有可调垂直矫顽力的 TbFeCo 合金薄膜的制造

具有可调垂直开关场和各向异性的稀土过渡金属 (RE-TM) TbFeCo 合金薄膜适用于高密度自旋电子器件。通过溅射复合靶法制备了一系列TbFeCo合金薄膜。通过非凡的霍尔效应 (EHE) 测量研究了亚铁磁 TbFeCo 薄膜的垂直磁性。随着溅射功率或气体流速的增加，观察到薄膜成分从富含 FeCo 的一侧转移到富含 Tb 的一侧，并且见证了易磁化轴的取向从面内、倾斜到面外的方向变化。证明了磁性能的显着变化，特别是 TbFeCo 薄膜的矫顽力，这与合金薄膜的 Tb 与 FeCo 比率的增加一致。它表明，通过适当组合溅射功率和流速，可以获得具有理想矫顽力的 TbFeCo 薄膜。我们的工作提供了一种在生长过程中调节溅射 TbFeCo 薄膜的 PMA 的有效方法，并可用作设计基于 TbFeCo 的自旋电子器件的指导。