Lissajous microscanners are very popular in compact laser-scanning applications, such as solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low power consumption. In the Lissajous scanner driven by a two-axis micro-electro-mechanical system scanning mirror (MEMS-SM), the design theory is insufficient to meet the temporal and spatial resolution at the same time. In this paper, the greatest common divisor of the two-axis driving frequency is used as the temporal resolution, the concept of the fill factor (FF) is used to describe the spatial resolution of the scanner, and a general algorithm for calculating the FF is presented. Combined with the characteristics of the Lissajous trajectory, three design rules of the general Lissajous scanner are proposed, and the design theory of the Lissajous scanner enabling MEMS LIDAR is perfected. Experimental results show that the proposed design rules can effectively meet the LIDAR design requirements.

由于其高品质因数和低功耗，Lissajous 微扫描仪在紧凑型激光扫描应用中非常受欢迎，例如固态光检测和测距 (LIDAR)。在由两轴微机电系统扫描镜（MEMS-SM）驱动的Lissajous扫描仪中，设计理论不足以同时满足时空分辨率。本文以两轴驱动频率的最大公约数作为时间分辨率，使用填充因子（FF）的概念来描述扫描仪的空间分辨率，以及计算FF的通用算法被表达。结合Lissajous轨迹的特点，提出了通用Lissajous扫描仪的三个设计规则，并且完善了支持MEMS LIDAR的Lissajous扫描仪的设计理论。实验结果表明，所提出的设计规则能够有效满足激光雷达的设计要求。