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Novel resonant pressure sensor based on piezoresistive detection and symmetrical in-plane mode vibration
Microsystems & Nanoengineering ( IF 7.9 ) Pub Date : 2020-11-16 , DOI: 10.1038/s41378-020-00207-0
Xiangguang Han 1, 2 , Qi Mao 1, 2 , Libo Zhao 1, 2 , Xuejiao Li 1, 2 , Li Wang 1, 2 , Ping Yang 1, 2 , Dejiang Lu 1, 2 , Yonglu Wang 1, 2 , Xin Yan 3 , Songli Wang 3 , Nan Zhu 1, 2 , Zhuangde Jiang 1, 2
Affiliation  

In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator. The working mode stress–frequency theory of a double-ended tuning fork with an enhanced coupling beam is proposed, which is compatible with the simulation and experiment. A unique piezoresistive detection method based on small axially deformed beams with a resonant status is proposed, and other adjacent mode outputs are easily shielded. According to the structure design, high-vacuum wafer-level packaging with different doping in the anodic bonding interface is fabricated to ensure the high quality of the resonator. The pressure sensor chip is fabricated by dry/wet etching, high-temperature silicon bonding, ion implantation, and wafer-level anodic bonding. The results show that the fabricated sensor has a measuring sensitivity of ~19 Hz/kPa and a nonlinearity of 0.02% full scale in the pressure range of 0–200 kPa at a full temperature range of −40 to 80 °C. The sensor also shows a good quality factor >25,000, which demonstrates the good vacuum performance. Thus, the feasibility of the design is a commendable solution for high-accuracy pressure measurements.



中文翻译:

基于压阻检测和对称面内模式振动的新型谐振压力传感器

在本文中,基于静电激励和压阻检测开发了一种新型谐振压力传感器。施加到膜片上的测量压力将导致谐振器的谐振频移。提出了具有增强耦合梁的双端音叉的工作模态应力-频率理论,该理论与仿真和实验兼容。提出了一种独特的基于具有谐振状态的轴向变形小梁的压阻检测方法,并且易于屏蔽其他相邻模式输出。根据结构设计,在阳极键合界面制作了不同掺杂的高真空晶圆级封装,以保证谐振器的高质量。压力传感器芯片采用干/湿蚀刻、高温硅键合、离子注入和晶圆级阳极键合。结果表明,制造的传感器具有~19 Hz/kPa 的测量灵敏度和 0.02% 满量程的非线性,在 -40 至 80 °C 的全温度范围内,0-200 kPa 的压力范围内。该传感器还显示出良好的品质因数 >25,000,这表明了良好的真空性能。因此,该设计的可行性是高精度压力测量的一个值得称赞的解决方案。

更新日期:2020-11-16
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