Abstract

In this work, a model of a microelectromechanical accelerometer with two movable beam elements located between two stationary electrodes is proposed. The action of inertia forces in the longitudinal direction leads to a change in the spectral properties of the system, which can be used as an output signal of the sensor. The dynamics of the system in the presence of weak electrostatic coupling between the sensitive elements is characterized by the phenomenon of modal localization, which is a significant change in the amplitude relationships for the forms of in-phase and antiphase oscillations with small changes in the measured component of the object’s acceleration vector. It has been shown that the sensitivity of the proposed sensor based on modal localization can be orders of magnitude higher than the sensitivity of systems based on measuring the shift of natural frequencies.

中文翻译：

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局域MEMS加速度计的新型模型

摘要

在这项工作中，提出了一种具有两个位于两个固定电极之间的可移动梁元件的微机电加速度计的模型。惯性力在纵向上的作用导致系统光谱特性的变化，该变化可用作传感器的输出信号。在敏感元件之间存在弱静电耦合的情况下，系统的动力学特征在于模态局部化现象，这是同相和反相振荡形式的幅度关系的重大变化，而被测值的变化很小对象的加速度矢量的分量。