Sputtered CdSe window layer can improve the short‐circuit current density (J_sc) of CdTe‐based thin‐film solar cell, however, meanwhile degrade the open‐circuit voltage (V_oc) and fill factor (FF). Herein, an oxygenation process is introduced during CdSe sputtering to improve this window layer's property for better device performance. The influence of oxygen on the CdSe is similar as the effect of oxygen on CdS. Incorporation of oxygen into the CdSe film promotes the formation of CdSeO₃ phase. Both V_oc and FF of the CdTe solar cells are improved due to the formation of CdSeO₃, and high efficiency (Eff.) of 18.6% is achieved. Efficiency improvement at module level is also demonstrated after applying the CdSe:O process in production line. This progress contributes to the CdTe‐based thin‐film module production for further efficiency improvement and cost reduction.

中文翻译：

---

通过溅射工艺制备的氧化CdSe层提高基于CdTe的薄膜太阳能电池的效率

溅射CdSe窗口层可以提高CdTe基薄膜太阳能电池的短路电流密度（J _sc），但同时会降低开路电压（V _oc）和填充因子（FF）。在此，在CdSe溅射过程中引入了氧化工艺，以改善该窗口层的性能，从而获得更好的器件性能。氧对CdSe的影响与氧对CdS的影响相似。将氧引入CdSe膜中促进了CdSeO ₃相的形成。两个V _OC在CdTe太阳能电池和FF是由于CdSeO的形成改善了₃，可实现18.6％的高效率。在生产线中采用CdSe：O工艺后，还证明了模块级的效率提高。这一进步为基于CdTe的薄膜模块生产做出了贡献，从而进一步提高了效率并降低了成本。