FPI-based fibre-optic sensor fabricated by excimer laser micromachining and fusion splicing HCF for multi-parameter measurements,Journal of Modern Optics

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FPI-based fibre-optic sensor fabricated by excimer laser micromachining and fusion splicing HCF for multi-parameter measurements
Journal of Modern Optics ( IF 1.3 ) Pub Date : 2020-09-01 , DOI: 10.1080/09500340.2020.1842927
Yinggang Liu ₁ , Bowen Li ₁ , Xiaoya Song ₁ , Danqing Yang ₁ , Yuxi Wang ₁

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An all-fibre splicing Fabry–Perot interferometer (FPI) sensor is successfully demonstrated for measurements of pressure, refractive index (RI) and temperature. The sensor structure is fabricated via fusing a tiny segment of hollow-core fibre (HCF) with single-mode fibre (SMF), and a micro-hole is micromachined on the HCF using a 193 nm excimer laser. Thus, the open micro-HCF can sense changes in air pressure and liquid RI. In contrast, the micro-SMF can only be used to measure temperature changes. The proposed sensor can be used for the measurements of air pressure, liquid RI and temperature. Experimental results show that the pressure resolution and liquid RI resolution of the sensor are 0.012 MPa and 10−5 RIU, respectively, and the temperature resolution is superior to be 0.08°C. The all-fibre sensor with the merits of small dimensions, easy fabrication and low cost can be used in harsh and small volume environments.

更新日期：2020-09-01

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