The multilayer nanostructures have drawn attention in fields from spintronics to microwave electronics. The purpose of this work was to determine the composition of individual layers and to control interfaces in three‐layer superstructures [(Co₄₀Fe₄₀B₂₀)₃₄(SiO₂)₆₆/ZnO/C]₄₆ by means of X‐ray diffraction and X‐ray reflectivity. The samples with different thicknesses of metal‐containing composite layers together with zinc oxide and carbon interlayers were deposited on the glass substrate by ion‐beam sputtering of three targets, one of which was a composite (Co₄₀Fe₄₀B₂₀)₃₄(SiO₂)₆₆. X‐ray diffraction results showed the X‐ray amorphous state of the ferromagnetic metal clusters CoFeB, the dielectric matrix of silicon oxide SiO₂, and carbon interlayers. However, the intermediate layers of the zinc oxide ZnO were found to have a nanocrystalline structure. The X‐ray reflectivity measurements indicate a good agreement between the experimental and nominal values of both the periods of three‐layer superstructures and the thicknesses of metal‐containing composite layers and interlayers.

中文翻译：

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多层纳米结构[（Co40Fe40B20）34（SiO2）66 / ZnO / C] 46中各个层和界面的状态

多层纳米结构在自旋电子学到微波电子学领域引起了关注。这项工作的目的是确定各层的组成并通过X射线衍射控制三层超结构[（Co ₄₀ Fe ₄₀ B ₂₀）₃₄（SiO ₂）₆₆ / ZnO / C] _46中的界面和X射线反射率。通过三个靶的离子束溅射将具有不同厚度的含金属复合层以及氧化锌和碳中间层的样品沉积在玻璃基板上，其中之一是复合物（Co ₄₀ Fe ₄₀ B ₂₀）₃₄（SiO ₂） ₆₆。X射线衍射结果表明，铁磁性金属团簇CoFeB，氧化硅SiO ₂的介电基质和碳中间层的X射线非晶态。然而，发现氧化锌ZnO的中间层具有纳米晶体结构。X射线反射率测量表明三层上部结构的周期的实验值和标称值与含金属的复合层和中间层的厚度两者之间具有良好的一致性。