We present a method to fabricate planar metal layers to be used as micromachined mirrors. Released mirrors of pure metal involve severe stress and reveal specific challenges to obtain planar mirror structures. Introducing sub-structures generating corrugated patterns, the metal mirror layers can be mechanically stabilized and undesired mirror bending can be reduced. For our investigations we used different arrangements of line structures on our metal mirrors, such as a group of straight or curved lines oriented differently. Comparing all the implemented different designs, planar micromirrors were achieved via sub-structures with a combination of straight lines arranged orthogonally to a single line. These planar micromirrors allow steering of the incident light by reflection and adjustment of the window transmittance. The presented low-cost method is suitable for large area fabrication of micromirror arrays, but also can be customized for other applications, where planar free-standing metal layers are required.

中文翻译：

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平面独立式金属层制造：在微镜阵列中实现用于光导应用的子结构

我们提出一种制造用作微机械镜的平面金属层的方法。释放的纯金属反射镜会承受巨大的应力，并暴露出获得平面反射镜结构的特定挑战。通过引入产生波纹状图案的子结构，可以使金属镜面层机械稳定，并且可以减少不希望的镜面弯曲。为了进行研究，我们在金属镜上使用了不同的线结构布置，例如一组方向不同的直线或曲线。比较所有已实现的不同设计，通过具有与一条直线正交布置的直线的组合的子结构来实现平面微镜。这些平面微镜允许通过反射和调整窗口透射率来控制入射光。