According to simulation results from FDTD, Fano resonance of the air-Si-Si-air combined waveguide cavity was mainly studied, including the distribution of the magnetic field, quality factor, extinction coefficient and transmission efficiency. Fano resonance was related to the height of Si. When the height H ₂=140 nm of Si and the height of H ₁ =300 nm, there was higher extinction coefficient in the resonant cavity and the better quality of the resonator, whose transmission efficiency of surface plasma was up to 89% for 1110 nm. This combined cavity had very good filtering effect.

中文翻译：

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空硅波导腔的共振

根据FDTD的仿真结果，主要研究了空气-Si-Si-空气复合波导腔的Fano共振，包括磁场分布，品质因数，消光系数和传输效率。磁场共振与Si的高度有关。当Si的高度H ₂ = 140 nm，高度H ₁ = 300 nm时，谐振腔内的消光系数更高，谐振器的质量更好，表面等离子体的传输效率在1110年可达89％纳米 该组合腔具有非常好的过滤效果。