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Plug-and-play acoustic tweezer enables droplet centrifugation on silicon superstrate with surface multi-layered microstructures
Sensors and Actuators A: Physical ( IF 4.6 ) Pub Date : 2020-11-11 , DOI: 10.1016/j.sna.2020.112432
Jingui Qian , Habiba Begum , Yuxin Song , Joshua E.-Y. Lee

Previous works have demonstrated the use of acoustic waves to manipulate microparticles and biological samples on bare glass and silicon superstrates. Traditionally, the surface acoustic wave (SAW) is converted into a Lamb wave propagating within a bare silicon superstrate via a thin coupling agent. The potential impact of acoustically driven microfluidics could be further augmented if applied to superstrates integrated with sensing structures that would allow sequential analysis after sample treatment. In this work, we demonstrate the applicability of acoustically-driven micro-centrifugation on a superstrate with multiple thin film layers to mimic sensing structures on a chip, and characterize the underlying performance. We propose an integrated plug-and-play platform comprised of a reusable SAW device interfaced to a disposable surface-micromachined silicon (SMS) superstrate processed with five layers of thin films. To address the shortcomings of existing coupling agents, we examine and compare the transmission efficiency and long-term stability of four kinds of coupling agents with the aim to enable disposable acoustofluidics applications. To investigate the effect of different superstrates on the performance of droplet centrifugation, we characterize and compare centrifugation on different superstrates. High-performance concentration was realized on the SMS superstrate under different conditions, such as input power, temperature, droplet volume, and particle size and density. In terms of more advanced fluidic handling functionality on a multi-layered SMS superstrate, we demonstrate ultrasonic isopycnic separation between microbeads differentiated by density on the SMS superstrate. The results herein lay the groundwork for realizing particle concentration on complex superstrates processed with multilayer films that represent a range of microfabricated sensors towards a broader goal of integrating acoustically driven concentration capabilities and sensing for applications in diagnostics and fundamental analysis.



中文翻译:

即插即用的声镊子可在具有表面多层微结构的硅覆盖板上进行液滴离心

先前的工作已经证明了使用声波来操纵裸露的玻璃和硅覆盖板上的微粒和生物样品。传统上,表面声波(SAW)会通过薄耦合剂转换为在裸露的硅基板内部传播的兰姆波。如果将声驱动微流体技术的潜在影响应用到与传感结构集成在一起的上层板,则可以在样品处理后进行顺序分析,从而进一步扩大其潜在影响。在这项工作中,我们演示了在具有多个薄膜层的覆板上进行声驱动微离心的适用性,以模仿芯片上的传感结构,并表征其基本性能。我们提出了一个集成的即插即用平台,该平台由可重复使用的SAW设备组成,该SAW设备连接到用五层薄膜处理的一次性表面微机械加工的硅(SMS)覆层。为了解决现有偶联剂的缺点,我们研究并比较了四种偶联剂的传输效率和长期稳定性,旨在实现一次性声流体应用。为了研究不同上层板对液滴离心性能的影响,我们表征并比较了不同上层板的离心分离。在不同条件下,例如输入功率,温度,液滴体积以及粒径和密度,SMS覆膜上实现了高性能浓缩。关于多层SMS覆盖板上更先进的流体处理功能,我们证明了SMS覆盖板上通过密度区分的微珠之间的超声等密度分离。本文的结果奠定了在实现多层膜加工的复杂覆膜上实现颗粒浓缩的基础,这些多层膜代表了一系列微型传感器,朝着集成声驱动的浓缩能力和传感技术在诊断和基础分析中的广泛目标迈进了一步。

更新日期:2020-11-12
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