In the present work, hydrogen gas sensing properties of palladium-capped copper oxide (Pd/CuO) thin films have been investigated. The Pd/CuO thin films were deposited on glass substrate for different deposition times (10–30 min) using direct current magnetron sputtering. The Pd/CuO thin films were characterized by x-ray diffraction, field emission scanning electron microscopy, atomic force microscopy and x-ray photoelectron spectroscopy for their structural, morphological and compositional properties, respectively. The Pd/CuO thin film sensor deposited for 10 min presents a remarkable sensing performance with fast response/recovery time of 10 s/50 s for hydrogen gas at a concentration of (1000 ppm) and optimum operating temperature of 300°C. The sensor is observed to be highly selective towards hydrogen (H₂) gas compared to the other gases such as carbon monoxide (CO) and ammonia (NH₃). The sensor is stable under high humidity conditions (60% RH). The studied Pd/CuO thin film sensor can be used to design a simple and low-cost sensor to detect low concentrations of H₂ gas for use in hydrogen-driven industries.

在目前的工作中，已经研究了钯盖的氧化铜（Pd / CuO）薄膜的氢气感测特性。使用直流磁控溅射将Pd / CuO薄膜以不同的沉积时间（10–30分钟）沉积在玻璃基板上。通过X射线衍射，场发射扫描电子显微镜，原子力显微镜和X射线光电子能谱分别对Pd / CuO薄膜的结构，形态和组成特性进行了表征。沉积10分钟的Pd / CuO薄膜传感器具有卓越的感测性能，对于浓度为（1000 ppm）的氢气和300°C的最佳工作温度，响应/恢复时间为10 s / 50 s。观察到该传感器对氢（H ₂）气体与其他气体（例如一氧化碳（CO）和氨（NH ₃））相比。该传感器在高湿度条件（60％RH）下稳定。所研究的Pd / CuO薄膜传感器可用于设计一种简单且低成本的传感器，以检测氢驱动行业中使用的低浓度H ₂气体。