In high power laser facility, irreversible damage on fused silica optics, induced by laser irradiation or processing, seriously affects the service life of optics. Therefore, the work of inhibiting damage growth has been carried out in various countries. In our work, an integrated multi-station system is designed to detect and mitigate surface damage on fused silica. The process of processing fused silica optics include UV laser conditioning, surface damage detection and surface damage mitigation with CO₂ laser. UV laser conditioning pre-initiates surface damage on fused silica optics with the laser flux less than Laser-Induced Damage Threshold (LIDT). Images of surface damage acquired from camera are processed by improved global threshold segmentation algorithm to extract damage information. Finally, CO₂ laser is applied to process the damage with specific morphology to enhance the laser damage resistance. This integrated multi-station system saves the repeated optics installation time between the workstations with the positioning accuracy of 20 μm. Furthermore, the damage with diameter of 10 μm is mitigated to prolong service life of processed fused silica optics. The efficient and accurate integrated multi-station system is of great significance for off-line detecting and mitigating surface damage of fused silica optics in high power laser facility.

在高功率激光设备中，由激光辐照或加工引起的熔融石英光学器件的不可逆损坏会严重影响光学器件的使用寿命。因此，已经在许多国家进行了抑制损害增长的工作。在我们的工作中，设计了一个集成的多工作站系统来检测和减轻熔融石英表面的损坏。处理熔融石英光学器件的过程包括紫外线激光调节，表面损伤检测和使用CO ₂激光减轻表面损伤。UV激光调节会在熔融石英光学元件上预先引发表面损伤，其激光通量小于激光诱导的损伤阈值（LIDT）。通过改进的全局阈值分割算法处理从相机获取的表面损伤图像，以提取损伤信息。最后，CO₂激光应用于处理具有特定形态的损伤，以增强抗激光损伤性。这种集成的多工作站系统节省了工作站之间重复的光学装置安装时间，定位精度为20μm。此外，减轻了直径为10μm的损坏，以延长加工的熔融石英光学器件的使用寿命。高效，准确的集成多站系统对于离线检测和减轻大功率激光设备中熔融石英光学器件的表面损伤具有重要意义。