Electrohydrodynamic (EHD) printing can rapidly fabricate micro- or nano-scale lines without employment of any mask, which is suitable for small volume production in industrial applications. However, it is required that the nozzles should be disposable since they can easily be blocked by the un-cleaned ink. CO₂ laser is an excellent tool for fabrication of micro-trenches in most of polymers with low-cost and high-speed. This paper presented a low-cost PMMA (Polymethyl methacrylate) nozzle fabrication method based on laser cutting and PDMS (Polydimethylsiloxane) curing bonding. The influence of thickness on the maximum stress and deformation rate of PMMA substrate was investigated to decrease the deformation of PMMA nozzle after laser cutting. To avoid stress concentration in PMMA nozzle after thermal bonding, PDMS curing bonding method was proposed. The effect of spin-coating speed on PDMS thickness was studied. The O₂ plasma conditions were optimized based on contact angle to improve the bonding strength of PMMA nozzle. The EHD printing experiments demonstrated the practicability of proposed nozzle fabrication method.

电液动力学（EHD）印刷无需使用任何掩膜即可快速制造微米或纳米级的线，适用于工业应用中的小批量生产。但是，由于喷嘴容易被未清洗的墨水堵塞，因此要求喷嘴是一次性的。一氧化碳₂激光是一种低成本，高速制造大多数聚合物微沟槽的极佳工具。本文提出了一种基于激光切割和PDMS（聚二甲基硅氧烷）固化粘接的低成本PMMA（聚甲基丙烯酸甲酯）喷嘴制造方法。研究了厚度对PMMA基板最大应力和变形率的影响，以减少激光切割后PMMA喷嘴的变形。为了避免热粘合后应力集中在PMMA喷嘴中，提出了PDMS固化粘合方法。研究了旋涂速度对PDMS厚度的影响。O ₂根据接触角优化了等离子体条件，以提高PMMA喷嘴的粘结强度。EHD印刷实验证明了所提出的喷嘴制造方法的实用性。