Solid-state nanopores have shown great potential in investigating salinity gradient energy generation as a renewable power generator. In this work, various diameter silicon nitride (Si3N[Formula: see text] nanopores were fabricated to investigate the power generation between two potassium chloride solutions with different concentration gradient ratios by reverse electrodialysis. The maximal estimated power density of a Si3N4 nanopore measured experimentally can be high to 16[Formula: see text]649Wm[Formula: see text]. To compare with the single Si3N4 nanopore, multiple nanopores array has also been investigated. The equivalent circuit model of multiple Si3N4 nanopores array generator is quantitatively constructed by massive reproducible experimental data and theoretical derivation. For nanopore array, the osmotic current basically keep a linear growth with the number of the nanopores at every concentration ratio. While, the osmotic voltage is basically independent on the number of nanopore. The power generation circuit of the nanopore array can be regarded as a parallel circuit of multiple nanopores. Power generation from concentration gradients in Si3N4 nanopores could be widely used in a variety of applications like ultra-low power devices and micro-nano electromechanical systems.

中文翻译：

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氮化硅纳米孔反电渗析盐度梯度发电

固态纳米孔在研究盐度梯度发电作为可再生能源方面显示出巨大潜力。在这项工作中，各种直径的氮化硅（Si3N[公式：见正文] 制备纳米孔以通过反向电渗析研究两种不同浓度梯度比的氯化钾溶液之间的发电。Si的最大估计功率密度3ñ4实验测得的纳米孔可高达16[公式：见正文]649Wm[公式：见正文]。与单 Si 进行比较3ñ4纳米孔，多纳米孔阵列也已被研究。多晶硅等效电路模型3ñ4纳米孔阵列发生器是通过大量可重复的实验数据和理论推导定量构建的。对于纳米孔阵列，在每个浓度比下，渗透电流与纳米孔的数量基本保持线性增长。而渗透电压基本上与纳米孔的数量无关。纳米孔阵列的发电电路可以看作是多个纳米孔的并联电路。利用 Si 中的浓度梯度发电3ñ4纳米孔可广泛用于各种应用，如超低功率器件和微纳机电系统。