Dislocations and their arrays in a {010}-oriented β-Ga₂O₃ substrate were observed using synchrotron X-ray diffraction (XRD) and X-ray topography (XRT). The XRD measurements used spatially-resolved ω-rocking curves to show that dislocation arrays have a linear contrast with a lower diffraction intensity and a broader full-width at half maximum. Further XRT observations at three different vectors resolved these lines as dot contrasts aligned along the four different directions and which correspond to the outcrops of threading dislocations that lay in four different slip planes. The Burgers vectors for these dislocation arrays were determined using the ∙ invisibility criterion. The results indicate there are four slip systems of (1) {001}, (2) {01}, (3) {10}, and (4) {100}. The slip system {10} has not been previously reported.

使用同步加速器X射线衍射（XRD）和X射线形貌（XRT）观察了在{010}取向的β- Ga ₂ O ₃衬底中的位错及其排列。XRD测量使用空间分辨的ω-摇摆曲线显示位错阵列具有线性对比，具有较低的衍射强度和较宽的半峰宽。在三个不同的进一步XRT观测矢量解决这些行沿四个不同方向排列的点的反差 和其对应于线程，在四个不同的滑移面铺设位错的露头。这些位错阵列的Burgers向量使用∙确定隐身标准。结果表明存在四个滑动系统：（1）{001}，（2）{ 01}，（3）{10 }和（4）{100}。滑动系统{10 }先前尚未报告。