ABSTRACT We demonstrate the applicability of a ratiometric luminescence thermometer to microelectronic components. The thermometer, which consists of a 980 nm laser diode, two optical filters, two photocells and two multimeters, works on the basis of thermal effect on luminescence intensity ratio of 980-nm-upconverted 530 and 550 nm emissions of micron-sized Er3+/Yb3+-codoped NaGd(WO4)2 crystalline phosphor. The applicability is demonstrated by using it to monitor in realtime the temperature of an integrated circuit chip on a printed circuit panel (PCB) in operation. In parallel, the temperature was also measured independently using an infrared thermometer. A comparison shows that the temperature measured by the luminescence thermometer can be considered as identical to that measured by the infrared one within error. The consistency of the result from the luminescence thermometer with that from the infrared one, together with previously reported result that the NaGd(WO4)2 phosphor is an excellent insulator with a resistivity of 2.0 × 1011 Ω∙m at 330 K, verifies the applicability of the luminescence thermometer to microelectronics, and the thermometer has a measurement error of 2 K.

中文翻译：

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基于Er3+/Yb3+:NaGd(WO4)2荧光粉绿光发光比例测温法在微电子元件中的应用

摘要 我们证明了比例式发光温度计对微电子元件的适用性。该温度计由一个 980 nm 激光二极管、两个滤光器、两个光电池和两个万用表组成，基于对 980 nm 上转换 530 和 550 nm 微米级 Er3+/ 发射的发光强度比的热效应工作Yb3+-共掺杂的 NaGd(WO4)2 晶体磷光体。通过使用它来实时监控运行中的印刷电路板 (PCB) 上的集成电路芯片的温度，证明了其适用性。同时，还使用红外温度计独立测量温度。对比表明，发光温度计测得的温度与红外测温仪测得的温度在误差范围内可以认为是一致的。