Abstract

The conditions of the laser-stimulated synthesis reaction of silicon-carbide nanoparticles are determined and their characterization is performed. The laser synthesis reaction of SiC particles in the gas phase is observed with the SiH₄/C₂H₂ flow ratio in the range of 1.6–3.2. The temperature in the reaction-zone region is ~1400–1500°C. Silicon-carbide nanoparticles ~6 nm in diameter are fabricated and their composition is investigated.

中文翻译：

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甲硅烷与乙炔混合物的激光热解法合成碳化硅纳米粒子

摘要

确定了碳化硅纳米颗粒的激光激发合成反应的条件，并进行了表征。SiH ₄ / C ₂ H ₂流量比在1.6-3.2范围内，观察到气相SiC粒子的激光合成反应。反应区的温度约为1400–1500°C。制备了直径约6 nm的碳化硅纳米颗粒，并研究了其组成。