Abstract The field emission and resulting breakdown induced damage in the actuation paths of MEMS capacitive switches are investigated. The effect of asperities burning due to Joule heating and the resulting explosive break down are presented. The breakdown gives rise to almost mirror craters formation on the cathode and anode electrodes. A linear relation between crater diameter and the breakdown current is found when breakdown occurs in vacuum. In ambient atmosphere the breakdown leads to large amplitude current oscillations and the formation of extended damage on both electrodes.

中文翻译：

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MEMS电容结构驱动路径中的场发射诱导损伤

摘要 研究了 MEMS 电容开关驱动路径中的场发射和由此引起的击穿损伤。介绍了由于焦耳加热引起的凹凸不平燃烧和由此产生的爆炸分解的影响。击穿导致阴极和阳极电极上几乎形成镜面陨石坑。当击穿发生在真空中时，发现弹坑直径与击穿电流之间存在线性关系。在环境大气中，击穿导致大振幅电流振荡并在两个电极上形成扩展损坏。